张慧课题组

ZHANGHUI GROUP

概述 Overview
北航集成电路学院拥有国际先进水平的微纳加工平台,可实现从微米级到纳米级尺度的精确加工,能够满足不同器件在结构设计和功能实现上的复杂需求。本课题组依托北航校级智能微纳公共创新中心,拥有对样品进行微纳加、测试的能力,同时负责极端条件测试区多台设备的运行与维护。

The School of Integrated Circuits at Beihang University maintains a micro/nano-fabrication platform at internationally advanced levels, capable of precision fabrication spanning micrometer to nanometer scales. This capability meets complex structural design and functional realization requirements for diverse devices. Our research group operates within Beihang University’s University-level Intelligent Micro-Nano Public Innovation Center. We possess full capabilities for micro/nano-fabrication and characterization of samples and manage the operation and maintenance of multiple instruments in the extreme-condition testing zone.